Development of a Finite Element Analysis-Based Numerical Solution for Virtual Rapid Prototyping of Piezoelectric Microelectromechanical Systems

Won Jee Chung, Hongwei Feng, Fred J. von Preissig, Mehrdad G. Nejhad, Junku Yuh

To be pesented at: ASME International Mechanical Engineering Congress and Exhibition (IMECE) Atlanta, GA, November 18-22. 1996 Symposium on Mechanics in MEMS