VRP for P-MEMS

VRP for P-MEMS
University of Hawaii
Honolulu, HI96822
PI's
Contact Person:
Others:
Personnel
Post-Doctorate Fellow:
Gratuate Students:
Project Summry
Facilities
UHMEMS
ONYX
Residual Stress Measurement
Publications
New Methods of Measuring a Key Elastic-Piezoelectric
Constant of Thin Films
Development of a Finite Element
Analysis-Based Numerical Solution for Virtual Rapid Prototyping of Piezoelectric Microelectromechanical Systems