VRP for P-MEMS

VRP for P-MEMS

University of Hawaii

Honolulu, HI96822

Email: pmls@wiliki.eng.hawaii.edu




PI's

Contact Person:

Others:



Personnel

Post-Doctorate Fellow:

Gratuate Students:



Project Summry



Facilities

  • UHMEMS
  • ONYX
  • Residual Stress Measurement

    Publications

  • New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films
  • Development of a Finite Element Analysis-Based Numerical Solution for Virtual Rapid Prototyping of Piezoelectric Microelectromechanical Systems